Electrochemical Local Maskless Micro/Nanoscale Deposition, Dissolution, and Oxidation of Metals and Semiconductors (A Review)
А. Д. Давыдов, В. М. Волгин
Abstract
The review is devoted to the modern methods of local maskless electrochemical machining of metals and semiconductors with the aim of formation of individual islands or cavities, their groups, and patterns according to a given program on their surface, or 3D micro/nanostructures, for example, metal threads and various thread structures. For this purpose, various methods of localizing the electrochemical deposition, dissolution, or oxidation are used.
Topics & Concepts
ElectrochemistryDissolutionNanostructureNanotechnologySemiconductorDeposition (geology)Materials scienceNanoscopic scaleChemical engineeringElectrodeChemistryOptoelectronicsGeologyPaleontologyPhysical chemistryEngineeringSedimentAdvanced Machining and Optimization TechniquesAnodic Oxide Films and NanostructuresAdvanced Surface Polishing Techniques