Enhancement-mode thin film transistor using amorphous phosphorus-doped Indium–Zinc–Tin-Oxide channel layer
Hui Yang, Weiguang Yang, Jinbao Su, Xiqing Zhang
Topics & Concepts
Materials scienceThin-film transistorAmorphous solidOptoelectronicsThreshold voltageOxide thin-film transistorDopingAnnealing (glass)Sputter depositionThin filmAmorphous siliconLayer (electronics)Analytical Chemistry (journal)SputteringSiliconTransistorNanotechnologyComposite materialCrystalline siliconElectrical engineeringVoltageEngineeringOrganic chemistryChemistryChromatographyThin-Film Transistor TechnologiesTransition Metal Oxide NanomaterialsZnO doping and properties