Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives
Wenxuan Zhao, Hangxin Li, Shengwei Wang
Topics & Concepts
CleanroomHigh techEfficient energy useEnergy conservationEngineeringAir conditioningProcess engineeringMechanical engineeringElectrical engineeringPhysicsQuantum mechanicsPolitical scienceLawBuilding Energy and Comfort OptimizationAdsorption and Cooling SystemsHygrothermal properties of building materials