Electroluminescent polycrystalline Er-doped Lu3Al5O12 nanofilms fabricated by atomic layer deposition on silicon
Jing Xu, Yang Li, Zhiqiang Ma, Yang Yang, Jiaming Sun
Topics & Concepts
Materials scienceDopingAtomic layer depositionElectroluminescenceCrystalliteCrystallizationSiliconAnnealing (glass)OptoelectronicsCrystallinityPolycrystalline siliconAnalytical Chemistry (journal)Layer (electronics)NanotechnologyChemical engineeringComposite materialMetallurgyChromatographyChemistryThin-film transistorEngineeringLuminescence Properties of Advanced MaterialsSilicon Nanostructures and PhotoluminescenceGa2O3 and related materials