Molecular dynamics simulation of ultra-precision machining 3C-SiC assisted by ion implantation
Houfu Dai, Yang Hu, Weilong Wu, Haixia Yue, Xiaosong Meng, Ping Li, Huigao Duan
Topics & Concepts
Materials scienceMachiningMolecular dynamicsIon implantationSurface roughnessGrindingAbrasiveIonSurface finishPolishingComposite materialMetallurgyComputational chemistryChemistryPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics