Litcius/Paper detail

Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

A. Yu. Shemakhin, В С Желтухин, E Yu Shemakhin, T N Terentev, A O Sofronitsky

2020Journal of Physics Conference Series14 citationsDOIOpen Access PDF

Abstract

Abstract A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.

Topics & Concepts

PlasmaDiagramSynchronization (alternating current)VoltFlow (mathematics)Materials scienceNuclear engineeringMechanicsPhysicsElectrical engineeringVoltageComputer scienceNuclear physicsEngineeringChannel (broadcasting)DatabasePlasma Diagnostics and ApplicationsPlasma Applications and DiagnosticsMagnetic confinement fusion research
Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization | Litcius