Spatial distribution of dopants and oxygen-related defects in antimony-doped Czochralski silicon
Sébastien Dubois, Wei Han, N. Enjalbert, Adrien Danel, Yichun Wang
Topics & Concepts
DopantAntimonySiliconDopingOxygenMaterials scienceSpatial distributionOptoelectronicsChemistryMetallurgyGeographyOrganic chemistryRemote sensingSilicon and Solar Cell TechnologiesSilicon Nanostructures and PhotoluminescenceSemiconductor materials and interfaces