A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM
Mohammad Tahmasebipour, Ali Vafaie
Topics & Concepts
Proof massAccelerometerMicroelectromechanical systemsCapacitive sensingAccelerationBrownian noiseMaterials scienceSuspension (topology)Noise (video)Sensitivity (control systems)FabricationAcousticsPiezoelectric accelerometerElectrical engineeringElectronic engineeringPiezoelectricityOptoelectronicsEngineeringComputer scienceComposite materialPhysicsPiezoelectric sensorWhite noiseTelecommunicationsImage (mathematics)MedicineAlternative medicineClassical mechanicsArtificial intelligenceHomotopyPure mathematicsOperating systemPathologyMathematicsAdvanced MEMS and NEMS TechnologiesAdvanced Machining and Optimization TechniquesMechanical and Optical Resonators