Intramodal Acousto-Optic Scattering of Opto-Piezomechanical Device on Aluminum Nitride
Haotian Shi, Chukun Huang, Linfeng Yu, Qiang Huang, Ming Cheng, Junqiang Sun
Abstract
We propose an integrated acousto-optic device with compact interdigital transducers (IDTs) design on aluminum nitride (AlN) platform for intramodal acousto-optic modulation. The designed suspended AlN-based acousto-optic devices are fabricated, which achieves maximum −34 dB double-sideband scattering, 3-dB RF modulation bandwidth up to 100 MHz, and optical operational bandwidth wider than 25 nm with stimulating acoustic wave frequency of 5.07 GHz in merely 560 × 65 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> device footprint area. This device offers new opportunities for achieving efficient microwave-to-optical conversion for enhancing Brillouin lasers, nonreciprocal isolators and other multiple acousto-optic interaction applications.