Fabrication of hexagonal microstructure on gallium nitride films by wet etching assisted femtosecond laser ablation
Yan Ou, Changyou Li, Jinwen Qian, Yifeng Xiao, Sheng Li, Zhengqiang Feng
Topics & Concepts
Materials scienceFabricationFemtosecondAblationHexagonal crystal systemMicrostructureGallium nitrideEtching (microfabrication)GalliumOpticsLaser ablationLaserOptoelectronicsNanotechnologyComposite materialMetallurgyCrystallographyEngineeringAlternative medicinePathologyLayer (electronics)PhysicsAerospace engineeringChemistryMedicineGaN-based semiconductor devices and materialsSemiconductor Quantum Structures and DevicesGa2O3 and related materials