Adaptive Backstepping Fast Terminal Sliding Mode Control With Estimated Inverse Hysteresis Compensation for Piezoelectric Positioning Stages
Chong Qin, Zhengqiang Zhang, Qin Fang
Abstract
In this brief, the motion control of piezoelectric positioning stages with unknown parameters is focused on, and an adaptive backstepping fast terminal sliding mode control based on the estimated inverse hysteresis compensation is proposed. First, the mathematical modeling of the piezoelectric positioning stages with asymmetric magnetic hysteresis nonlinearity is constructed. An estimated inverse compensator is used to compensate for asymmetric hysteresis nonlinearity. Furthermore, by merging backstepping and fast terminal sliding mode control methods and adopting adaptive control for the online estimation of unknown parameters, we ensure that the system can achieve finite-time trajectory tracking. Finally, the performance of the controller is verified through simulation and experiments.