Temperature-Dependent n-Type and p-Type Sensing Behaviors of CuO Nanosheets/MEMS to NO<sub>2</sub> Gas
Jei-Li Hou, Ting‐Jen Hsueh
Abstract
This study uses a micro-electromechanical system (MEMS) structure to fabricate a cupric oxide (CuO) nanosheet (NS) gas sensor. A CuO-NS with a size ranging from 100 to 500 nm is produced by chemical synthesis and ultrasonic wave grinding. The sensor is used to detect 50 ppb of NO2 at various temperatures. The result indicates a temperature-dependent sensing behavior to NO2 in a CuO sensor. It exhibits abnormal n-type behavior at lower temperatures, with a transition to p-type at higher temperatures. The mechanism for this behavior is proposed.
Topics & Concepts
NanosheetMicroelectromechanical systemsMaterials scienceOxideChemical sensorUltrasonic sensorCopper oxideNanotechnologyAnalytical Chemistry (journal)ChemistryAcousticsMetallurgyPhysical chemistryChromatographyElectrodePhysicsGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors