Effects of fringing capacitances and electrode’s finiteness in improved SiC membrane based micromachined ultrasonic transducers
Moumita Pal, C. Lalengkima, Reshmi Maity, Srimanta Baishya, N. P. Maity
Topics & Concepts
Capacitive micromachined ultrasonic transducersUltrasonic sensorTransducerMaterials scienceCapacitanceAcousticsElectrodeFinite element methodCoupling (piping)VoltageOptoelectronicsElectrical engineeringComposite materialStructural engineeringEngineeringPhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesUltrasonics and Acoustic Wave PropagationAcoustic Wave Resonator Technologies