Effect of photocatalysts on electrochemical properties and chemical mechanical polishing rate of GaN
Xuan Yu, Baoguo Zhang, Ru Wang, Zhengxiao Kao, Shenghua Yang, Wei Wei
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials sciencePhotocatalysisCatalysisElectrochemistrySlurryChemical engineeringWaferComposite materialNanotechnologyChemistryElectrodePhysical chemistryOrganic chemistryEngineeringSemiconductor materials and devicesGaN-based semiconductor devices and materialsGa2O3 and related materials