Flexible lateral shearing interferometry based on polarization gratings for surface figure metrology
Hyo Bin Jeong, Hyo Mi Park, Young-Sik Ghim, Ki-Nam Joo
Topics & Concepts
OpticsInterferometryBirefringenceMetrologyMaterials sciencePolarization (electrochemistry)Shearing (physics)Shearing interferometerAstronomical interferometerPhysicsChemistryComposite materialPhysical chemistryOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements