Performance of H-diamond MOSFETs with high temperature ALD grown HfO2 dielectric
Zeyang Ren, Dandan Lv, Jiamin Xu, Kai Su, Jinfeng Zhang, Dong Wang, Yong Wu, Jincheng Zhang, Yue Hao
Topics & Concepts
DiamondMaterials scienceOptoelectronicsPassivationHigh-κ dielectricDielectricMOSFETAtomic layer depositionField-effect transistorChemical vapor depositionTransistorLayer (electronics)NanotechnologyElectrical engineeringVoltageComposite materialEngineeringDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesElectronic and Structural Properties of Oxides