Laser micro/nano machining of silicon
Bassam G. Rasheed, Mohammed A. Ibrahem
Topics & Concepts
Materials scienceEtching (microfabrication)SiliconLaserPorous siliconOptoelectronicsWaferNanostructureIsotropic etchingReactive-ion etchingLayer (electronics)NanotechnologyOpticsPhysicsSilicon Nanostructures and PhotoluminescenceNanowire Synthesis and ApplicationsLaser Material Processing Techniques