Nonparametric identification of a MEMS resonator actuated by levitation forces
Mohammed Abdel Razzaq, Rodrigo Tumolin Rocha, Yu Tian, Shahrzad Towfighian, Sami F. Masri, Mohammad I. Younis
Topics & Concepts
Nonlinear systemRestoring forceControl theory (sociology)StiffnessMicroelectromechanical systemsLevitationParametric statisticsPolynomialWork (physics)Quadratic equationAccelerationSystem identificationNonlinear system identificationPhysicsComputer scienceMathematicsEngineeringStructural engineeringMagnetMathematical analysisClassical mechanicsMeasure (data warehouse)Mechanical engineeringGeometryQuantum mechanicsStatisticsArtificial intelligenceControl (management)DatabaseMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications