Sub-wavelength GHz-fast broadband ITO Mach–Zehnder modulator on silicon photonics
Rubab Amin, Rishi Maiti, Yaliang Gui, Can Suer, Mario Miscuglio, Elham Heidari, Ray T. Chen, Hamed Dalir, Volker J. Sorger
Abstract
Here we demonstrate a spectrally broadband, gigahertz-fast Mach–Zehnder interferometric modulator exhibiting a miniscule <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msub> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">V</mml:mi> </mml:mrow> <mml:mi>π</mml:mi> </mml:msub> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">L</mml:mi> </mml:mrow> </mml:math> of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mn>95</mml:mn> <mml:mspace width="thickmathspace"/> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">V</mml:mi> </mml:mrow> <mml:mo>⋅</mml:mo> <mml:mtext>µ</mml:mtext> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> </mml:math> , deploying a subwavelength short electrostatically tunable plasmonic phase shifter based on heterogeneously integrated indium tin oxide thin films into silicon photonics.