Litcius/Paper detail

Dislocation slip mechanism and prediction method during the ultra-precision grinding process of monocrystalline silicon

Ming Li, Xiaoguang Guo, Ning Huang, Yanyu Yang, Renke Kang, Dongming Guo, Ping Zhou

2024Materials Science in Semiconductor Processing18 citationsDOI

Topics & Concepts

Monocrystalline siliconMaterials scienceGrindingMechanism (biology)SiliconProcess (computing)DislocationSlip (aerodynamics)MetallurgyComposite materialComputer scienceThermodynamicsOperating systemPhilosophyPhysicsEpistemologyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques