The polishing properties of magnetorheological-elastomer polishing pad based on the heterogeneous Fenton reaction of single-crystal SiC
Da Hu, Jiabin Lu, Jiayun Deng, Qiusheng Yan, Haotian Long, Yingrong Luo
Topics & Concepts
PolishingMaterials scienceChemical-mechanical planarizationMagnetorheological fluidComposite materialSurface roughnessMetallurgyStructural engineeringDamperEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchVascular Malformations Diagnosis and Treatment