A white-light interferometry method for 3D measurement of compactly spaced micro-nano structural units
Xin Lei, Zhongming Yang, Zhaojun Liu
Topics & Concepts
MicroelectronicsWhite light interferometryInterferometryAerospaceMaterials scienceNanostructureComputer scienceNano-AlgorithmOpticsNanotechnologyPhysicsEngineeringComposite materialAerospace engineeringOptical measurement and interference techniquesSurface Roughness and Optical MeasurementsAdvanced Fiber Optic Sensors