Backside Laser Testing of Single-Event Effects in GaN-on-Si Power HEMTs
C. Ngom, V. Pouget, M. Zerarka, F. Coccetti, Antoine Touboul, M. Matmat, Olivier Crépel, S. Jonathas, Guillaume Bascoul
Abstract
We present backside laser testing of gallium nitride (GaN) power devices on Si substrate using optical parameters compatible with three-photon absorption in GaN and single-photon absorption in the substrate. The laser/device interaction is described. Two different kinds of transients are observed at the gate electrode and analyzed. The technique allows identifying the sensitive regions of the devices and generating destructive events.
Topics & Concepts
Gallium nitrideMaterials scienceOptoelectronicsLaserSubstrate (aquarium)Absorption (acoustics)Wide-bandgap semiconductorElectrodeSemiconductor laser theoryLaser power scalingOpticsSemiconductorNanotechnologyPhysicsQuantum mechanicsOceanographyLayer (electronics)GeologyComposite materialRadiation Effects in ElectronicsSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis