MEMS-based resistive hydrogen sensor with high performance using a palladium-gold alloy thin film
Jin Gong, Zhaohui Wang, Yankun Tang, Jianhai Sun, Xueyong Wei, Qunming Zhang, Tian Geng, Hairong Wang
Topics & Concepts
HydrogenMaterials scienceHydrogen sensorHydrogen purifierThin filmMicroelectromechanical systemsAlloyAnnealing (glass)Sputter depositionResistive touchscreenSputteringChemical engineeringPalladiumAnalytical Chemistry (journal)Hydrogen productionNanotechnologyMetallurgyChemistryCatalysisOrganic chemistryChromatographyEngineeringElectrical engineeringBiochemistryGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors