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Investigation into the role of Si and SiC phases in RB-SiC ceramics surface modified ultra-precision grinding

Jiabin Xu, Qiongyi He, Xiangyu Zhang, Xiaoou Yi, Yang Yu, Yingjie Li, Long Zhang, Runrun Gu, Feihu Zhang, Feihu Zhang

2024Materials Science in Semiconductor Processing11 citationsDOI

Topics & Concepts

Materials scienceCeramicGrindingSurface roughnessBrittlenessSilicon carbideMachiningSurface finishComposite materialMetallurgyAerogels and thermal insulationSilicone and Siloxane ChemistryAdvanced ceramic materials synthesis
Investigation into the role of Si and SiC phases in RB-SiC ceramics surface modified ultra-precision grinding | Litcius