A study of the phase transformation of low temperature deposited tantalum thin films using high power impulse magnetron sputtering and pulsed DC magnetron sputtering
Wei-Chieh Chen, Zhaoying Wang, Chiao-Yi Yu, Bo-Huei Liao, Ming-Tzer Lin
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringTantalumPulsed DCSputter depositionThin filmSputteringTantalum nitrideDuty cycleOptoelectronicsMetallurgyNanotechnologyElectrical engineeringVoltageEngineeringMetal and Thin Film MechanicsCopper Interconnects and ReliabilityAdvanced materials and composites