Top-down nanofabrication approaches toward single-digit-nanometer scale structures
Dong Kyo Oh, Heonyeong Jeong, Joohoon Kim, Yeseul Kim, Inki Kim, Jong G. Ok, Junsuk Rho
Topics & Concepts
NanolithographyNanotechnologyMaterials scienceNanophotonicsLithographyElectron-beam lithographyAtomic layer depositionNanometreFabricationStencil lithographyNanoelectronicsNanostructureOptoelectronicsResistThin filmLayer (electronics)PathologyMedicineComposite materialAlternative medicineNanofabrication and Lithography TechniquesNear-Field Optical MicroscopyNanowire Synthesis and Applications