Effects of the doping level in the production of silicon nanowalls by metal assisted chemical etching
Viridiana Aca-López, Enrique Quiroga‐González, Estela Gómez-Barojas, Jolanta Światowska, José Alberto Luna López
Topics & Concepts
WaferMaterials scienceEtching (microfabrication)DopingIsotropic etchingElectrical resistivity and conductivitySiliconMetalBoronDry etchingChemical engineeringNanotechnologyAnalytical Chemistry (journal)MetallurgyOptoelectronicsChemistryLayer (electronics)Organic chemistryChromatographyElectrical engineeringEngineeringNanowire Synthesis and ApplicationsAdvancements in Semiconductor Devices and Circuit DesignSemiconductor materials and interfaces