High deposition rate films prepared by reactive HiPIMS
Pavel Mareš, Martin Dubau, Jan Polášek, T. Mates, Tomáš Kozák, J Vyskočil
Topics & Concepts
High-power impulse magnetron sputteringDeposition (geology)Materials scienceChemical engineeringChemistrySputteringEnvironmental chemistryNanotechnologyThin filmSputter depositionGeologyEngineeringSedimentPaleontologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices