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On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor

Hamed Mobki, Amin Majidzadeh Sabegh, Aydin Azizi, Hassen M. Ouakad

2020Microsystem Technologies26 citationsDOI

Topics & Concepts

CapacitorControl theory (sociology)Robustness (evolution)CapacitanceSettling timeOvershoot (microwave communication)Computer scienceSliding mode controlVoltageEngineeringElectrodeStep responseControl engineeringControl (management)Electrical engineeringPhysicsNonlinear systemTelecommunicationsArtificial intelligenceChemistryQuantum mechanicsGeneBiochemistryAdvanced MEMS and NEMS TechnologiesDielectric materials and actuatorsMechanical and Optical Resonators
On the implementation of adaptive sliding mode robust controller in the stabilization of electrically actuated micro-tunable capacitor | Litcius