In-situ non-destructive removal of tin particles by low-energy plasma for imitation of EUV optical mirrors self-cleaning
Sishu Wang, Zongbiao Ye, Guo Pu, Jianxing Liu, Li Yang, Wenna Jing, Mingming Yu, Fangling Yang, Yichao Peng, Fujun Gou, Jianjun Wei
Topics & Concepts
TinPlasmaLangmuir probeEtching (microfabrication)IonHydrogenPlasma cleaningMaterials sciencePlasma etchingAtomic physicsAnalytical Chemistry (journal)ChemistryPlasma diagnosticsNanotechnologyLayer (electronics)MetallurgyPhysicsChromatographyOrganic chemistryQuantum mechanicsDiamond and Carbon-based Materials ResearchPlasma Diagnostics and ApplicationsLaser-induced spectroscopy and plasma