Effect of nitrogen content on the mechanical and biological properties of tantalum nitride coatings
Shizhu Liao, LiJing Yang, ZhenLun Song, Zhengyin Zhou, QingKe Zhang, Chi Yang, Jisi Zheng
Topics & Concepts
Materials scienceTantalum nitrideCoatingBiocompatibilityTantalumNitrideVolumetric flow rateComposite materialSputter depositionSputteringNitrogenMetallurgyLayer (electronics)Thin filmNanotechnologyChemistryPhysicsOrganic chemistryQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites