Investigation on diamond damaged process during a single-scratch of single crystal silicon carbide
Nian Duan, Yiqing Yu, Weibin Shi, Qi Xiao, Qing Liu
Topics & Concepts
Materials scienceDiamondSilicon carbideSingle crystalScratchSiliconComposite materialCrystal (programming language)MetallurgyCrystallographyComputer scienceProgramming languageChemistryAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research