Study of novel chelator and 1, 2, 4-triazole on cobalt corrosion and Co/Cu surface finishing in barrier CMP
Xiaofan Yang, Baoguo Zhang, Zhaoxia Yang
Topics & Concepts
CobaltMaterials scienceCopperCorrosionX-ray photoelectron spectroscopySurface roughnessChelationNuclear chemistryInorganic chemistryMetallurgyChemical engineeringChemistryComposite materialEngineeringAdvanced Surface Polishing TechniquesAdvanced materials and compositesIntegrated Circuits and Semiconductor Failure Analysis