A MEMS-based electromagnetic membrane actuator utilizing bonded magnets with large displacement
Chao Qi, Dong Han, Tadahiko Shinshi
Topics & Concepts
Materials scienceMagnetNeodymium magnetMembraneDemagnetizing fieldActuatorComposite materialMicroelectromechanical systemsForce densitySphere packingDisplacement (psychology)Power densityMechanical engineeringMagnetizationOptoelectronicsMagnetic fieldElectrical engineeringPower (physics)BiologyGeneticsPsychotherapistQuantum mechanicsEngineeringPhysicsPsychologyAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator Technologies