p-type semi-transparent conductive NiO films with high deposition rate produced by superimposed high power impulse magnetron sputtering
Tung‐Han Chuang, Chao-Kuang Wen, Sheng‐Chi Chen, Ming-Han Liao, Fen Liu, Hui Sun
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionDeposition (geology)OptoelectronicsElectrical resistivity and conductivityNon-blocking I/OCavity magnetronIonizationSputteringAnalytical Chemistry (journal)Thin filmNanotechnologyIonChemistryElectrical engineeringBiochemistryOrganic chemistryPaleontologyBiologyCatalysisEngineeringChromatographySedimentZnO doping and propertiesTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and Sensors