Suppression of pesting failure in MoSi2 film by doping of Si
Xiuhan Yu, Fengji Li, Xunwang Shi, Deen Sun, Jinbiao Wang, Sam Zhang
Topics & Concepts
Materials scienceAnnealing (glass)Sputter depositionThin filmDopingWaferChemical engineeringTube furnaceSiliconScanning electron microscopeMetallurgySputteringComposite materialNanotechnologyOptoelectronicsEngineeringIntermetallics and Advanced Alloy PropertiesMXene and MAX Phase MaterialsSemiconductor materials and interfaces