Significantly improved high k dielectric performance: Rare earth oxide as a passivation layer laminated with TiO2 film
Shuan Li, Weipeng Wang, Youyu Lin, Linlin Wang, Xingguo Li
Topics & Concepts
Materials sciencePassivationDielectricBilayerAnnealing (glass)OptoelectronicsMicrostructureBand gapOxideCapacitorLayer (electronics)Composite materialMetallurgyVoltageElectrical engineeringGeneticsBiologyMembraneEngineeringSemiconductor materials and devicesSemiconductor materials and interfacesCopper Interconnects and Reliability