Ultrafast planarization of large-scale polycrystalline diamond by microsecond laser processing: Investigation of polishing mechanisms and impact on the material
Jinxin Zou, Sheng Ye, Vadim Sedov, Wangzhe Leng, Peng Liu, P. A. Pivovarov, Liangxian Chen, Jianjun Zhang, Jinlong Liu, Chengming Li, Junjun Wei
Topics & Concepts
Chemical-mechanical planarizationMicrosecondDiamondPolishingMaterials sciencePolycrystalline diamondCrystalliteLaserUltrashort pulseNanotechnologyForensic engineeringComposite materialMetallurgyOpticsEngineeringPhysicsDiamond and Carbon-based Materials ResearchLaser Material Processing TechniquesAdvanced Surface Polishing Techniques