Parylene-C diaphragm-based low-frequency photoacoustic sensor for space-limited trace gas detection
Zhenfeng Gong, Yewei Chen, Tianli Gao, Ke Chen, Yexiang Jiao, Min Guo, Bo Zhang, Shuai Liu, Liang Mei, Wei Peng, Qingxu Yu
Topics & Concepts
Materials scienceParyleneDiaphragm (acoustics)OpticsOptical fiberOptoelectronicsAcousticsVibrationPolymerPhysicsComposite materialSpectroscopy and Laser ApplicationsAdvanced Chemical Sensor TechnologiesGas Sensing Nanomaterials and Sensors