Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing
Hadi Sena, Atsushi Tanaka, Yotaro Wani, Tomomi Aratani, Toshiki Yui, Daisuke Kawaguchi, Ryuji Sugiura, Yoshio Honda, Yasunori Igasaki, Hiroshi Amano
Topics & Concepts
Materials scienceWaferGallium nitrideOptoelectronicsLaserScanning electron microscopeSubstrate (aquarium)DislocationSiliconOpticsComposite materialLayer (electronics)GeologyOceanographyPhysicsIntegrated Circuits and Semiconductor Failure AnalysisThin-Film Transistor TechnologiesGaN-based semiconductor devices and materials