High-precision intelligent measurement of surface relief grating parameters based on physical knowledge and an improved Tandem model
Shengquan Nian, Yifan Ding, Shijie Liu, Lu Qi, Yunxia Jin, Zhigang Han, Jianda Shao, Rihong Zhu
Topics & Concepts
TandemGratingSurface (topology)Computer scienceMaterials scienceEngineeringOptoelectronicsAerospace engineeringMathematicsGeometryOptical Systems and Laser TechnologyOptical measurement and interference techniquesSurface Roughness and Optical Measurements