Thermal engineering in ALD-grown ZGO thin films for high-performance photodetectors

Si-Tong Ding, Yu‐Chang Chen, Cai-Yu Shi, Lei Shen, Qiu-Jun Yu, Lang‐Xi Ou, Ze-Yu Gu, Na Chen, Ting‐Yun Wang, David Wei Zhang, Hong-Liang Lü

2024Journal of Material Science and Technology10 citationsDOI

Topics & Concepts

PhotodetectorOptoelectronicsMaterials scienceThermalThin filmEngineering physicsNanotechnologyEngineeringPhysicsMeteorologyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials