Chemical mechanical polishing of silicon wafers using developed uniformly dispersed colloidal silica in slurry
Wenxiang Xie, Zhenyu Zhang, Li Wang, Xiangxiang Cui, Shiqiang Yu, Hongjiu Su, Shudong Wang
Topics & Concepts
Materials scienceWaferChemical-mechanical planarizationSlurryColloidal silicaSiliconPolishingChemical engineeringDispersitySurface roughnessDissolutionColloidComposite materialNanotechnologyMetallurgyPolymer chemistryCoatingEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications