Adaptive parametric yield enhancement via collinear multivariate analytics for semiconductor intelligent manufacturing
Chen–Fu Chien, Chia‐Cheng Chen
Topics & Concepts
CollinearityInterpretabilityMulticollinearityMultivariate statisticsLatent variablePartial least squares regressionFeature selectionComputer scienceCurse of dimensionalityParametric statisticsDimensionality reductionPrincipal component analysisStatisticsMathematicsEconometricsData miningRegression analysisArtificial intelligenceIndustrial Vision Systems and Defect DetectionSpectroscopy and Chemometric AnalysesAdvanced Statistical Process Monitoring