Mechanical properties and biocompatibility evaluation of TiZrNbTaFe high entropy alloy films deposited using a hybrid HiPIMS and RF sputtering system
Pei‐Shan Wu, Hsin Chao, Shih‐Jie Lin, Yung‐Chin Yang, Chun-Wei Hou, Jyh‐Wei Lee, Bih-Show Lou
Topics & Concepts
High-power impulse magnetron sputteringBiocompatibilityMaterials scienceAlloySputteringSputter depositionHigh entropy alloysMetallurgyComposite materialNanotechnologyThin filmHigh Entropy Alloys StudiesAdditive Manufacturing Materials and ProcessesHigh-Temperature Coating Behaviors