First Fire-free, Low-voltage (~1.2 V), and Low Off-current (~3 nA) SiO<sub>x</sub>Te<sub>y</sub> Selectors
S. Vaziri, I. Datye, Elia Ambrosi, Asir Intisar Khan, Hyun-Keun Kwon, C. H. Wu, Chia‐Wei Hsu, Jeremy Guy, T. Y. Lee, H.‐S. Philip Wong, X. Y. Bao
Abstract
Operating voltage compatibility and low power consumption are crucial for on-chip integration of high-density one-selector-one-resistor (1S/1R) arrays. However, traditional chalcogenide-based threshold selectors require a one-time first fire operation with voltage higher than the threshold voltage. Here, we introduce a novel SiOTe selector based on a stable silicon oxide matrix, with tunable first fire voltage and ultimately first fire-free characteristics. These selectors achieve low threshold voltages (V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</inf> = 1.1 V – 1.5 V) and low off-current (I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</inf> ~ 3 nA at 0.5 V for V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</inf> = 1.2 V). SiOTe selectors show promising thermal stability (300 °C, 30 min in air) and endurance of >10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">8</sup> cycles.