Growth of highly c-axis oriented ZnO thin films by spray pyrolysis for piezoelectric applications
J. R. Ramos-Serrano, Salvador Alcántara‐Iniesta, M. Acosta-Osorno, M. E. Calixto
Topics & Concepts
Materials sciencePiezoelectricityThin filmCrystallinitySubstrate (aquarium)CantileverComposite materialDiffractionSiliconGrain sizePiezoelectric coefficientAnalytical Chemistry (journal)OptoelectronicsNanotechnologyOpticsGeologyChromatographyPhysicsChemistryOceanographyZnO doping and propertiesGaN-based semiconductor devices and materialsAcoustic Wave Resonator Technologies