<scp>Polydimethylsiloxane</scp>/carboxylated h<scp>ydroxylated multiwalled carbon nanotubes/polyimide</scp> composite membrane wearable flexible piezoresistive tactile sensor device with microsphere array
Ruqian Sun, Jiaqing Xie, Xiaoyu Meng, Haoran Pang, Chuchu Gong, Fuyang Zhou
Abstract
Abstract This research proposed a flexible piezoresistive tactile sensor (FPTS) device with imprinted microsphere array to realize the accurate and stable acquisition of human motion data. The thickness of conductive membrane on the sensitivity of the sensor were investigated by FEM simulation, the copper microsphere array mold was prepared by multipoint imprinting process and the electromechanical response curves of piezoresistive tactile sensor consisting of Hydroxylated Multiwalled Carbon Nanotubes/Polyimide (carboxylated MWCNT/PI) composite membrane and Polydimethylsiloxane/Hydroxylated Multiwalled Carbon Nanotubes/Polyimide (PDMS/carboxylated MWCNT/PI) composite membrane with double‐sided microsphere were tested. The result shows that reduce the chord height can improve the sensitivity of the sensor. The composite structure with PDMS/carboxylated MWCNT/PI composite membrane reduces the overall stiffness of the microsphere structure, which is conducive to improve the sensitivity and minimum the detection limit of the FPTS. Multipoint imprinting technology is an efficient processing method to obtain high consistency microsphere array. The electromechanical response curves of piezoresistive tactile sensor consisting of PDMS/carboxylated MWCNT/PI composite membrane with double‐sided microsphere shows that the detection limits can reach 0.0289 kPa, and the sensitivity is 1.139 kPa −1 . The sensor has high stability, especially when the wearing radius of curvature is more than 30 mm.