Polishing mechanism analysis of silicon carbide ceramics combined ultrasonic vibration and hydroxyl
Xin Chen, Chao Zhang, Fanwei Meng, Tianbiao Yu, Ji Zhao
Topics & Concepts
PolishingAbrasiveMaterials scienceCeramicSilicon carbideDiamondChemical-mechanical planarizationSlurrySurface roughnessComposite materialUltrasonic sensorSurface finishCarbideMetallurgyPhysicsAcousticsAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research